18EC822 Micro Electro Mechanical Systems Notes


18EC822 Micro Electro Mechanical Systems VTU CBCS Notes

Here you can download the VTU 2018 Scheme notes, and Study materials of 18EC822 Micro Electro Mechanical Systems of the Electronics and Communications Engineering department.

University Name: Visvesvaraya Technological University (VTU), Belagavi

Branch Name: Electronics and Communication Engineering – ECE

Semester: 8th (4th Year BE)

Subject Code and Subject Name: 18EC822 Micro Electro Mechanical Systems

Scheme of Examination: 2018 Scheme

Marks Distribution: 40 Marks for Continuous Internal Assessment and 60 Marks for Semester end examination

Important Concepts discussed:

1st Module covers “MEMS and Microsystem, Typical MEMS and Microsystems Products, Evolution of Microfabrication, Microsystems, and Microelectronics.”

2nd Module covers “Working Principles of Microsystems: Introduction, Microsensors, Microactuation.”

3rd Module covers “introduction, Molecular Theory of Matter and Intermolecular Forces, Plasma Physics, Electrochemistry..”

4th Module covers “Scalingin Geometry, Scaling in Rigid-Body Dynamics, Scaling in Electrostatic Forces, Scaling in Fluid Mechanics, Scaling in Heat Transfer.”

5th Module covers “Bulk Micromanufacturing, Surface Micromachining, The LIGA Process, Summary on Micromanufacturing.”

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